Micro Precision MP1 Microcosmic Surface | Nano 3D Optical Surface Profilometer | SuperView W1 for Nano 3D Surface and Form

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Description

Item No.: MP1

Product name: SuperView MP1 for Nano 3D Surface and Form


Standard field of view: ( 0.49*0.49 ) mm


Max field of view: ( 6×6 ) mm


Reflectivity of test object:0.5 % ~100 %


Repeatability of Roughness RMS:0.005nm


Scanning range:≤10mm


Resolution:0.1nm


Accuracy of stage measurement:0.3 %


Repeatability of stage measurement: 0.08% 1σ


X, Y Object table :


Size: ( 320×200 ) mm


Moving range: ( 140×110 ) mm


Load capacity:10kg


Control method:Motorized

SuperView MP1 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image.

The SuperView MP1 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface.

Parameters

Light source Green LED


Video system 1024×1024


Optical lens 10×、50× ,(Optional 2.5×,5×,20×,100×)


Optical zoom 1×(Optional 0.5×、0.75×)


Lens holder 3 holes-manual


Size 200×200mm


Moving range 100×100mm(Customization is supported)


Loading capacity 10kg


Control method Motorized


Tilt ±4°Manual


Moving range 100mm


Control method Motorized


Scanning range of Z axis 2.2mm(bigger range is optional)


Resolution of Z axis 0.1nm


Max scanning speed 30µm/s


Uncertainty 0.3%


Repeatability 0.08% 1σ


Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.

Zoom ratio of lens 2.5×


Numerical hole diameter 0.075


Optical resolution @550nm(µm) 3.7


Depth of focus(µm) 48.6


Working distance(mm) 10.3


Field H×V Video system 1024×1024:


0.5× = 3.84×3.84


0.75× = 2.56×2.56


1× = 1.92×1.92

Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:

Standard Parameters ISO 4287-1997 Principal section


Amplitude : Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku


interval : PSm,Pdq


Substance : Pmr,Pdc


Peak : PPc





Standard Parameters ISO 4287-1997 Roughness


Amplitude: Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku


interval: RSm,Rdq


Substance: Rmr,Rdc,Rmr(Rz/4)


Peak: RPc





Standard Parameters ISO 4287-1997 Waviness


Amplitude: Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku


interval: WSm,Wdq


Substance: Wmr,Wdc,Wmr(Wz/4)


Peak: WPc


ISO 13565 ISO 13565-2 Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk


ISO 12085


Roughness graph R,AR,R× ,Nr


Waviness graph W,AW,W×,Wte


Other graph Rke,Rpke,Rvke


AMSE B46.1  2D Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt


DIN EN ISO 4287-2010 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,


Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr,


Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr


JIS B0601-2013 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,


Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr


Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr


GBT 3505-2009 Original profile Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr,


Roughness Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr


Waviness Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr

3D Parameters

Light source Green LED


Standard Parameters


ISO 25178 Height Sq,Ssk,Sku,Sp,Sv,Sz,Sa


function Smr,Smc,S×p


Space Sal,Str,Std


Composite parameters Sdq,Sdr


Volume Vm,Vv,Vmp,Vmc,Vvc,Vvv


Form Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv


Functional Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq


ISO 12781 Flatness FLTt,FLTp,FLTv,FLTq


EUR 15178N Amplitude Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St


Space Str,Std,Sal


Composite parameters Sdq,Sds,Ssc,Sdr,Sfd


Area, Volume Smr,Sdc


Function Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq


Functional Sbi,Sci,Svi


EUR 16145 EN Amplitude Sa,Sq,Sy,Sz,Ssk,Sku


Mixed parameters Ssc,Sdq,Sdr


Functional Sbi,Sci,Svi,Sk,Spk,Svk


Space Sds,Std,Stdi,Srw,Srwi


Hardness Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp


ASME B46.1 3D St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt

It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.

Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.

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Laboratory Calibration

Micro Precision operates 36 laboratories globally providing reliable localized support

  • Certified metrologists staffing laboratories in North America, Central America, South America, Europe, Asia, and the Middle East
  • Comprehensive scopes of accreditation to meet a broad range of customer needs
  • Expedited calibration services available
  • Pickup and delivery services available
  • Environmentally controlled facilities to ensure high quality and accurate calibrations and measurements.
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Calibration Service For This Equipment

Laboratory Calibration

Micro Precision operates 36 laboratories globally providing reliable localized support

  • Certified metrologists staffing laboratories in North America, Central America, South America, Europe, Asia, and the Middle East
  • Comprehensive scopes of accreditation to meet a broad range of customer needs
  • Expedited calibration services available
  • Pickup and delivery services available
  • Environmentally controlled facilities to ensure high quality and accurate calibrations and measurements.
Calibration Service For This Equipment
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Quality Certified Test Equipment Repair Services

When a piece of equipment fails you have the option to repair or replace that item. Oftentimes repair is an economical and efficient solution. Micro Precision’s repair offering provides advantages to our customers:

  • Cost effective; often less than OEM
  • Efficient; often much better turn-time than the OEM
  • Flexibility; willingness to work with customers to meet their needs
  • Warranted repairs
  • Ability to service many obsolete instruments
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Quality Certified Test Equipment Repair Services

When a piece of equipment fails you have the option to repair or replace that item. Oftentimes repair is an economical and efficient solution. Micro Precision’s repair offering provides advantages to our customers:

  • Cost effective; often less than OEM
  • Efficient; often much better turn-time than the OEM
  • Flexibility; willingness to work with customers to meet their needs
  • Warranted repairs
  • Ability to service many obsolete instruments
Repair Service For This Equipment

Cost Effective Test Equipment Options

From the leasing of specialized electronic equipment for a specific task, to the purchase of physical and dimensional tools, we offer leasing services as well as used test equipment sales. We also locate hard-to-find electronics, and provide flexible options to meet ever-changing equipment needs.

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Cost Effective Test Equipment Options

From the leasing of specialized electronic equipment for a specific task, to the purchase of physical and dimensional tools, we offer leasing services as well as used test equipment sales. We also locate hard-to-find electronics, and provide flexible options to meet ever-changing equipment needs.

Rent or Purchase This Equipment
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Our Capabilities

Micro Precision can perform instrument calibration services on equipment from variety of applications for specific industries and lines of business. If you have a calibration need that is not listed in this area, please contact us.

Electrical

Micro Precision accredited electrical calibration lab services with multimeter, multifunction calibrator, oscilloscope, and power supply capabilities.

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Micro Precision accredited optical, light, and fiber optic calibration lab services.

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Micro Precision accredited thermodynamic & chemical calibration lab services with temperature, humidity, life science, and pharma capabilities.

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Micro Precision accredited RF & microwave calibration lab services.

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Micro Precision accredited mechanical and dimensional calibration lab services with pressure, torque, force, flow, velocity, and aircraft jack load capabilities.

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Semiconductor

ANAB Accredited to ISO/IEC 17025-2017 Accredited semiconductor wafer thickness and precision step hight calibration.

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Micro Precision offers on-site and worldwide instrument and equipment calibration services and solutions serving a broad range of industry sectors and applications.

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Via our sister company Micro Precision Test Equipment Inc., we offer customers rental and leasing services, which gives our customers flexible options to meet ever-changing equipment needs.

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